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[For the Semiconductor Industry] Insufficient Equipment Accuracy Due to Materials

For those struggling with accuracy due to thermal deformation and vibrations. We are releasing guidelines for selecting materials to achieve high precision.

Are you struggling with "not achieving the desired precision in exposure and etching processes"? As equipment miniaturization progresses, the main cause of declining yield is thermal deformation and vibration of components. We propose Hinode's special materials to solve this precision issue from the "material" perspective. ■ Low Thermal Expansion Cast Iron 'Hinode GD Invar' - Low thermal expansion: Thermal deformation is about 1/5 that of steel. Material lineup with a linear expansion coefficient of 1.0 to 5.0 ppm/°C. - Near-net shape: Reduces processing range and material loss, lowering costs. - Easy to machine: Unique material properties reduce processing costs and accommodate precision machining. ○ There are examples of approximately 30% cost reduction compared to all processing from sheet materials. ■ High Damping Material 'Mineral Casting' 1. Damping properties: Has about 10 times the vibration damping capacity of cast iron, particularly absorbing high-frequency vibrations. 2. Thermal stability: Minimizes the influence of external environments due to low thermal conductivity. ○ By combining material properties and shape optimization, there are cases where the tuning time for equipment requiring sub-micron precision was reduced by about 60%. If you feel limited by your current precision, why not reconsider your materials? [For details, please download the catalog from the link below.]